What are SEMI Standards?

Semiconductor machines present a special class of safety concerns and hazards. They are the most sophisticated, expensive, and sometimes dangerous of any type of manufacturing or research equipment. Hazards can include high voltage, extreme high and low temperatures, fire and explosion hazards, strong magnetic fields, toxic and corrosive gasses, other dangerous chemicals, compressed air, pneumatics, hydraulics, moving parts, noise, vibration, radiation, hazardous wastes and more.

Semiconductor Equipment and Materials International (SEMI) is a trade organization which develops consensus standards for semiconductor manufacturing equipment and safe construction. The standards are managed under ANSI to prevent favoritism.

SEMI standards are detailed, covering all aspects of semiconductor manufacturing machines, from design and construction to installation, operation, maintenance and decommissioning.

Many sophisticated buyers of Semiconductor equipment such as IBM require a SEMI S2 report as a condition of sale. Even without a stated requirement, a SEMI assessment is good marketing collateral and a smart way for Semiconductor Equipment Manufacturers to keep a competitive edge.

Typical scope of work:

Abstraction Engineering will conduct professional engineering services to provide a standard, combination report (~90 pages) that includes:

  • S2-0712 Environmental Health & Safety Guideline
  • S8-0712 Ergonomics Engineering
  • S10-0307 Risk Assessment and Risk Evaluation
  • S13-0305 EH&S Documents (manuals)
  • S14-0309 Fire Risk Assessment and Mitigation
  • NFPA 70 & 79 electrical evaluation and label (AKA field labeling)

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